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Investigation of space filling capacitorsMicroelectronics, 2003. ICM 2003. Proceedings of the 15th International Conference on (2003), pp. 287-290.
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AbstractThis paper investigates the usage of the family of space filling curves in capacitor design. Some of the known family members are studied regarding their applications as area efficient capacitor elements. One of the main advantages of these structures is that they divide the space into two continuous electrodes. This makes extra connecting vias and metal layers unnecessary, and enables implementation on a single metal layer. The capacitance of the suggested structures are obtained and compared with some of the reference structures such as the interdigitated and woven capacitors.
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