Capacity limits and matching properties of integrated capacitors

by: R Aparicio, A Hajimiri

Solid-State Circuits, IEEE Journal of, Vol. 37, No. 3. (2002), pp. 384-393.

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Abstract

Theoretical limits for the capacitance density of integrated capacitors with combined lateral and vertical field components are derived. These limits are used to investigate the efficiency of various capacitive structures such as lateral flux and quasifractal capacitors. This study leads to two new capacitor structures with high lateral-field efficiencies. These new capacitors demonstrate larger capacities, superior matching properties, tighter tolerances, and higher self-resonance frequencies than the standard horizontal parallel plate and previously reported lateral-field capacitors, while maintaining comparable quality factors. These superior qualities are verified by simulation and experimental results

@article{citeulike:2060685, abstract = {Theoretical limits for the capacitance density of integrated capacitors with combined lateral and vertical field components are derived. These limits are used to investigate the efficiency of various capacitive structures such as lateral flux and quasifractal capacitors. This study leads to two new capacitor structures with high lateral-field efficiencies. These new capacitors demonstrate larger capacities, superior matching properties, tighter tolerances, and higher self-resonance frequencies than the standard horizontal parallel plate and previously reported lateral-field capacitors, while maintaining comparable quality factors. These superior qualities are verified by simulation and experimental results}, author = {Aparicio, R. and Hajimiri, A. }, booktitle = {Solid-State Circuits, IEEE Journal of}, citeulike-article-id = {2060685}, journal = {Solid-State Circuits, IEEE Journal of}, keywords = {capacitor}, number = {3}, pages = {384--393}, posted-at = {2007-12-05 12:05:43}, priority = {2}, title = {Capacity limits and matching properties of integrated capacitors}, url = {http://ieeexplore.ieee.org/xpls/abs\_all.jsp?arnumber=987091}, volume = {37}, year = {2002} }

RIS record

TY - JOUR ID - citeulike:2060685 L3 - citeulike-article-id:2060685 TI - Capacity limits and matching properties of integrated capacitors T2 - Solid-State Circuits, IEEE Journal of JF - Solid-State Circuits, IEEE Journal of VL - 37 IS - 3 SP - 384 EP - 393 N2 - Theoretical limits for the capacitance density of integrated capacitors with combined lateral and vertical field components are derived. These limits are used to investigate the efficiency of various capacitive structures such as lateral flux and quasifractal capacitors. This study leads to two new capacitor structures with high lateral-field efficiencies. These new capacitors demonstrate larger capacities, superior matching properties, tighter tolerances, and higher self-resonance frequencies than the standard horizontal parallel plate and previously reported lateral-field capacitors, while maintaining comparable quality factors. These superior qualities are verified by simulation and experimental results KW - capacitor AU - Aparicio, R AU - Hajimiri, A PY - 2002/// UR - http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=987091 ER -

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