Bending-comb capacitor with a small parasitic inductance

@inproceedings{citeulike:2060687, abstract = {A new metal-metal capacitor with a small parasitic inductance, named a bending-comb capacitor (BCC), is proposed based on a standard digital CMOS technology. The BCC is applicable to high frequency circuits due to its high self-resonance frequency. An analytical evaluation of the capacitance from the geometry size is also presented. The self-resonance frequency of the BCC of 0.85 pF with the size of 10 /spl mu/m /spl times/ 100 /spl mu/m is estimated as 374 GHz with a 0.13-/spl mu/m Cu-wiring CMOS process. This frequency is about six times higher than that estimated by the conventional comb capacitor.}, author = {Imamura, A. and Fujishima, M. and Hoh, K. }, booktitle = {VLSI Circuits Digest of Technical Papers, 2002. Symposium on}, citeulike-article-id = {2060687}, journal = {VLSI Circuits Digest of Technical Papers, 2002. Symposium on}, keywords = {capacitor}, pages = {22--25}, posted-at = {2007-12-05 12:06:50}, priority = {2}, title = {Bending-comb capacitor with a small parasitic inductance}, url = {http://ieeexplore.ieee.org/xpls/abs\_all.jsp?arnumber=1015033}, year = {2002} }

TY - CONF ID - citeulike:2060687 L3 - citeulike-article-id:2060687 TI - Bending-comb capacitor with a small parasitic inductance T2 - VLSI Circuits Digest of Technical Papers, 2002. Symposium on JF - VLSI Circuits Digest of Technical Papers, 2002. Symposium on SP - 22 EP - 25 N2 - A new metal-metal capacitor with a small parasitic inductance, named a bending-comb capacitor (BCC), is proposed based on a standard digital CMOS technology. The BCC is applicable to high frequency circuits due to its high self-resonance frequency. An analytical evaluation of the capacitance from the geometry size is also presented. The self-resonance frequency of the BCC of 0.85 pF with the size of 10 /spl mu/m /spl times/ 100 /spl mu/m is estimated as 374 GHz with a 0.13-/spl mu/m Cu-wiring CMOS process. This frequency is about six times higher than that estimated by the conventional comb capacitor. KW - capacitor AU - Imamura, A AU - Fujishima, M AU - Hoh, K PY - 2002/// UR - http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=1015033 ER -