Quasi-planar high-Q millimeter-wave resonators

by: KJ Vanhille, DL Fontaine, C Nichols, DS Filipovic, Z Popovic

Microwave Theory and Techniques, IEEE Transactions on, Vol. 54, No. 6. (2006), pp. 2439-2446.

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Abstract

Several low-profile 250-/spl mu/m-high Ka-band cavity resonators are demonstrated with resonant frequencies near 26 GHz and unloaded quality (Q) factors greater than 400. The air-filled copper cavity resonators are fabricated on a silicon substrate using a photolithographic process. A microrectangular coaxial transmission-line feed is integrated in the same process. Four resonators with different mechanical support structures are demonstrated. The resonators are designed using the finite-element method and simulation of both the resonant frequency and Q factor agree well with measurements.

@article{Vanhille-MTT-2006, abstract = {Several low-profile 250-/spl mu/m-high Ka-band cavity resonators are demonstrated with resonant frequencies near 26 GHz and unloaded quality (Q) factors greater than 400. The air-filled copper cavity resonators are fabricated on a silicon substrate using a photolithographic process. A microrectangular coaxial transmission-line feed is integrated in the same process. Four resonators with different mechanical support structures are demonstrated. The resonators are designed using the finite-element method and simulation of both the resonant frequency and Q factor agree well with measurements.}, author = {Vanhille, K. J. and Fontaine, D. L. and Nichols, C. and Filipovic, D. S. and Popovic, Z. }, booktitle = {Microwave Theory and Techniques, IEEE Transactions on}, citeulike-article-id = {2743391}, doi = {10.1109/TMTT.2006.875794}, journal = {Microwave Theory and Techniques, IEEE Transactions on}, keywords = {rcl, resonator}, number = {6}, pages = {2439--2446}, posted-at = {2008-05-01 21:35:25}, priority = {0}, title = {Quasi-planar high-Q millimeter-wave resonators}, url = {http://dx.doi.org/10.1109/TMTT.2006.875794}, volume = {54}, year = {2006} }

RIS record

TY - JOUR ID - Vanhille-MTT-2006 L3 - citeulike-article-id:2743391 TI - Quasi-planar high-Q millimeter-wave resonators T2 - Microwave Theory and Techniques, IEEE Transactions on JF - Microwave Theory and Techniques, IEEE Transactions on VL - 54 IS - 6 SP - 2439 EP - 2446 N2 - Several low-profile 250-/spl mu/m-high Ka-band cavity resonators are demonstrated with resonant frequencies near 26 GHz and unloaded quality (Q) factors greater than 400. The air-filled copper cavity resonators are fabricated on a silicon substrate using a photolithographic process. A microrectangular coaxial transmission-line feed is integrated in the same process. Four resonators with different mechanical support structures are demonstrated. The resonators are designed using the finite-element method and simulation of both the resonant frequency and Q factor agree well with measurements. KW - rcl KW - resonator AU - Vanhille, KJ AU - Fontaine, DL AU - Nichols, C AU - Filipovic, DS AU - Popovic, Z PY - 2006/// UR - http://dx.doi.org/10.1109/TMTT.2006.875794 ER -

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