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Low-power LC-VCO using integrated MEMS passives

by: VK Saraf, D Ramachandran, A Oz, GK Fedder, T Mukherjee
Radio Frequency Integrated Circuits (RFIC) Symposium, 2004. Digest of Papers. 2004 IEEE (2004), pp. 579-582.


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Low power RF operation is often limited by the poor quality factor of the passives available in silicon-based processes. This paper reports on an LC-tank VCO, incorporating micromachined inductors and capacitors, for low power operation, without sacrificing performance. Only 2.75 mW of power is needed to achieve -122 dB/Hz phase noise at 1 MHz from a 2.84 GHz carrier.


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