these_morel's tags

3d-integration absorption actinometry aluminium angle ar bcl3 bcl3-o2 c4f8 c4f8-ar-h2 capacitive cbrf3 ccl4-o2 cf3-cl cf4 cf4-cl2 cf4-o2 chemical-vapor-deposition chf3 chf3-cl2-bcl3 cl2 cl2-nf3-o2 cl2-o2 clo cmos co co2 damage decomposition deformation-resist deposition dhf dielectric dissociation dry-etching dual-metal-gate ecr effet-de-charge eot etching floating_sample fluorine fluorocarbon gate gate-patterning hbr hbr-cl2-o2 hbr-o2 helicon-plasma hf hfalo hfn hfo2 hfon hfsio hfsion high-k icp incorporation introduction line-edge-roughness masking-materials mass-spectrometry materials metal metal-gate microelectronics midgap mo molecular-beam-system molybdenum moores-law mosi n2 negative-ion neural-networks new-devices nf3 nf3-h2 nf3-he nf3-o2 nitrogen notching o2 optical-emission-spectroscopy oxidation parois plasma plasmas polydepletion polymer_layer poly-si recess resistivity resist-trimming rie ruthenium selectivity sf6 sf6-ar sf6-ar-cl2 sf6-chf3 sf6-n2 sf6-o2 sicl4-cl2 silicon sio2 sputter-deposition tac tan taper tcp tcp_9400 temperature time-delay-effect tin titane_nitride titanium tungsten tungsten-nitride tungsten-oxide tunneling uhf-ecr vlsi volatility wcl wco6 wet-etching wocl work-function wsi wsix xps zralo zro2

CiteULike organises scholarly (or academic) papers or literature and provides bibliographic (which means it makes bibliographies) for universities and higher education establishments. It helps undergraduates and postgraduates. People studying for PhDs or in postdoctoral (postdoc) positions. The service is similar in scope to EndNote or RefWorks or any other reference manager like BibTeX, but it is a social bookmarking service for scientists and humanities researchers.